JPH0619049Y2 - 変位検出装置 - Google Patents

変位検出装置

Info

Publication number
JPH0619049Y2
JPH0619049Y2 JP1988106364U JP10636488U JPH0619049Y2 JP H0619049 Y2 JPH0619049 Y2 JP H0619049Y2 JP 1988106364 U JP1988106364 U JP 1988106364U JP 10636488 U JP10636488 U JP 10636488U JP H0619049 Y2 JPH0619049 Y2 JP H0619049Y2
Authority
JP
Japan
Prior art keywords
scale
displacement detection
displacement
absolute origin
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988106364U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0227510U (en]
Inventor
征司 坂上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP1988106364U priority Critical patent/JPH0619049Y2/ja
Publication of JPH0227510U publication Critical patent/JPH0227510U/ja
Application granted granted Critical
Publication of JPH0619049Y2 publication Critical patent/JPH0619049Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)
JP1988106364U 1988-08-11 1988-08-11 変位検出装置 Expired - Lifetime JPH0619049Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988106364U JPH0619049Y2 (ja) 1988-08-11 1988-08-11 変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988106364U JPH0619049Y2 (ja) 1988-08-11 1988-08-11 変位検出装置

Publications (2)

Publication Number Publication Date
JPH0227510U JPH0227510U (en]) 1990-02-22
JPH0619049Y2 true JPH0619049Y2 (ja) 1994-05-18

Family

ID=31339806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988106364U Expired - Lifetime JPH0619049Y2 (ja) 1988-08-11 1988-08-11 変位検出装置

Country Status (1)

Country Link
JP (1) JPH0619049Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6212815U (en]) * 1985-07-10 1987-01-26
JPS6344112U (en]) * 1986-09-05 1988-03-24

Also Published As

Publication number Publication date
JPH0227510U (en]) 1990-02-22

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